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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10075552
Filing Dt:
02/13/2002
Publication #:
Pub Dt:
10/17/2002
Inventors:
Ryuji Biro, Minoru Otani, Kenji Ando, Hidehiro Kanazawa, Yasuyuki Suzuki
Title:
Optical element for use in exposure apparatus and rinsing method therefor
Assignment: 1
Reel/Frame:
012985/0956Recorded: 06/11/2002Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/09/2002
Exec Dt:
05/08/2002
Exec Dt:
04/24/2002
Exec Dt:
05/13/2002
Exec Dt:
04/26/2002
Assignee:
3-30-2, SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondent:
MORGAN & FINNEGAN, LLP
JOSEPH A. CALVARUSO
345 PARK AVENUE
NEW YORK, NY 10154-0053

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