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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/28/2006
Application #:
10096068
Filing Dt:
03/12/2002
Publication #:
Pub Dt:
10/24/2002
Inventor:
Fuminori Akiba
Title:
ELECTROSTATIC CHUCK CLEANING METHOD
Assignment: 1
Reel/Frame:
012963/0499Recorded: 06/10/2002Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
05/14/2002
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
MOSER, PATTERSON & SHERIDAN, LLP
WILLIAM B. PATTERSON
3040 POST OAK BLVD., STE. 1500
HOUSTON, TX 77056

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