Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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09791252
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Filing Dt:
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02/23/2001
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Publication #:
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Pub Dt:
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10/31/2002
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Inventors:
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Theodore H. Fedynyshyn, Roderick K. Kunz, Michael Sworin, Roger Sinta
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Title:
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LOW ABOSORBING RESISTS FOR 157 NM LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 77 MASSACHUSETTS AVENUE |
| BOSTON, MASSACHUSETTS 02139 |
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| NUTTER, MCCLENNEN & FISH, LLP |
| REZA MOLLAAGHABABA |
| ONE INTERNATIONAL PLACE |
| BOSTON, MA 02110-2699 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 40 WRIGHT STREET, BLDG 1120 |
| ESC/JAZ |
| HANSCOM AFB, MASSACHUSETTS 01731 |
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| ESC/JAZ |
| CATHERINE A. SCHULZ |
| 40 WRIGHT STREET, BLDG 1120 |
| HANSCOM AFB, MA 01731-2903 |
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