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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
09852957
Filing Dt:
05/10/2001
Publication #:
Pub Dt:
11/14/2002
Inventors:
Ellis Harvey, Yakov Epshteyn, Frank Krupa
Title:
Method and apparatus for semiconductor wafer cleaning
Assignment: 1
Reel/Frame:
011798/0522Recorded: 05/10/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/04/2001
Exec Dt:
05/04/2001
Exec Dt:
05/04/2001
Assignee:
305 N. 54TH STREET
CHANDLER, ARIZONA 85226
Correspondent:
SHAUKAT A. KARJEKER
MERCHANT & GOULD P.C.
P.O. BOX 2903
MINNEAPOLIS, MN 55402-0903

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