Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/01/2005
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Application #:
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10154263
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Filing Dt:
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05/23/2002
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Publication #:
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Pub Dt:
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11/28/2002
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Inventor:
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Koji Kikuchi
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Title:
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PHASE SHIFT MASK, METHOD OF EXPOSURE, AND METHOD OF PRODUCING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-35, KITASHINAGAWA 6-CHOME |
| SHINAGAWA-KU, TOKYO 141, JAPAN |
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| SONNENSCHEIN NATH & ROSENTHAL |
| DAVID R. METZGER |
| P.O. BOX #061080 |
| WACKER DRIVE STATION, SEARS TOWER |
| CHICAGO, IL 60606-1080 |
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