Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10175806
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Filing Dt:
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06/21/2002
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Publication #:
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Pub Dt:
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12/12/2002
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Inventors:
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Wayne L. Johnson, Murray D. Sirkis
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Title:
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Method and system for reducing damage to substrates during plasma processing with a resonator source
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, ET AL |
| MICHAEL R. CASEY |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VIRGINIA 22202 |
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