Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10121791
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Filing Dt:
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04/10/2002
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Publication #:
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Pub Dt:
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12/19/2002
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Inventors:
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Maximilian A. Biberger, Frederick P. Layman, Thomas R. Sutton
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Title:
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High pressure processing chamber for semiconductor substrate including flow enhancing features
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2120 WEST GUADALUPE ROAD |
| GILBERT, ARIZONA 85223 |
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| HAVERSTOCK & OWENS LLP |
| THOAMS B. HAVERSTOCK |
| 162 NORTH WOLFE ROAD |
| SUNNYVALE, CA 94086 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-848, JAPAN |
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| HAVERSTOCK & OWENS, LLP |
| THOMAS B. HAVERSTOCK |
| 162 NORTH WOLFE ROAD |
| SUNNYVALE, CA 94086 |
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