Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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10168544
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Filing Dt:
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07/02/2002
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Publication #:
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Pub Dt:
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12/19/2002
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Inventors:
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Medona B. Denton, Wayne L. Johnson, Murray D. Sirkis
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Title:
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METHOD OF WAFER BAND-EDGE MEASUREMENT USING TRANSMISSION SPECTROSCOPY AND A PROCESS FOR CONTROLLING THE TEMPERATURE UNIFORMITY OF A WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER |
| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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