Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/25/2006
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Application #:
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10172977
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Filing Dt:
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06/18/2002
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Publication #:
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Pub Dt:
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12/26/2002
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Inventors:
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Arulkumar P. Shanmugasundram, Helen Armer, Alexander T. Schwarm
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Title:
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METHOD, SYSTEM AND MEDIUM FOR PROCESS CONTROL FOR THE MATCHING OF TOOLS, CHAMBERS AND/OR OTHER SEMICONDUCTOR-RELATED ENTITIES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| CYNTHIA K. NICHOLSON |
| PATENT COUNSEL, MS/2061 |
| LEGAL AFFAIRS DEPT, P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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