Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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10133963
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Filing Dt:
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04/25/2002
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Publication #:
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Pub Dt:
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01/02/2003
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Inventors:
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Rudolf von Bunau, Christian Hembd-Sollner, Hubert Holderer
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Title:
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PROJECTION EXPOSURE SYSTEM AS WELL AS A PROCESS FOR COMPENSATING IMAGE DEFECTS OCCURRING IN THE PROJECTION OPTICS OF A PROJECTION EXPOSURE SYSTEM, IN PARTICULAR FOR MICROLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 885 THIRD AVE., SUITE 2900 |
| NEW YORK, NEW YORK 10022-4838 |
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| FACTOR & PARTNERS, LLC |
| JODY L. FACTOR |
| 1327 W. WASHINGTON BLVD. |
| SUITE 5G/H |
| CHICAGO, IL 60607 |
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