Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/09/2007
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Application #:
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09894230
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Filing Dt:
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06/27/2001
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Publication #:
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Pub Dt:
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01/02/2003
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Inventors:
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Francis Ko, Richard Chen, Charlie Lee
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Title:
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METHOD FOR ARGON PLASMA INDUCED ULTRAVIOLET LIGHT CURING STEP FOR INCREASING SILICON-CONTAINING PHOTORESIST SELECTIVITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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MARTINE & PENILLA, LLP |
MICHAEL L. GENCARELLA |
710 LAKEWAY DRIVE, SUITE 170 |
SUNNYVALE, CA 94085 |
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