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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
7374636
Issue Dt:
05/20/2008
Application #:
10205870
Filing Dt:
07/26/2002
Publication #:
20030006008
Pub Dt:
01/09/2003
Inventors:
Keiji Horioka, Chun Yan, Taeho Shin, Roger Alan Lindley, Panyin Hughes, Douglas H. Burns et al
Title:
METHOD AND APPARATUS FOR PROVIDING UNIFORM PLASMA IN A MAGNETIC FIELD ENHANCED PLASMA REACTOR
Assignment: 1
Reel/Frame:
013149/0501Recorded: 07/26/2002Pages: 21
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
HORIOKA, KEIJI
Exec Dt:
06/20/2002
YAN, CHUN
Exec Dt:
06/17/2002
SHIN, TAEHO
Exec Dt:
06/21/2002
LINDLEY, ROGER ALAN
Exec Dt:
06/17/2002
HUGHES, PANYIN
Exec Dt:
07/15/2002
BURNS, DOUGLAS H.
Exec Dt:
07/19/2002
LEE, EVANS Y.
Exec Dt:
06/21/2002
PU, BRYAN Y.
Exec Dt:
06/14/2002
LI, QI
Exec Dt:
06/18/2002
DAHIMENE, MAHMOUD
Exec Dt:
07/18/2002
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
PATENT COUNSEL
P.O. BOX 450A
SANTA CLARA, CA 95052

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