Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/26/2005
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Application #:
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10102613
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Filing Dt:
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03/20/2002
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Publication #:
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Pub Dt:
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01/09/2003
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Inventors:
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Martin Ross-Messemer, Alexander Menck, Frank Holler, Kurt Franke, Gunter Martin et al
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Title:
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DIFFRACTION-OPTICAL COMPONENT, ILLUMINATION SYSTEM AND EXPOSURE SYSTEM COMPRISING SUCH A DIFFRACTION-OPTICAL COMPONENT AS WELL AS AN EXPOSURE METHOD EMPLOYING SUCH AN EXPOSURE SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HEIDENHEIM (BRENZ) |
| GERMANY D89518 |
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| ROSENTHAL & OSHA L.L.P. |
| JEFFREY S. BERGMAN |
| 1221 MCKINNEY, SUITE 2800 |
| HOUSTON, TX 77010 |
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