Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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10119812
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Filing Dt:
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04/09/2002
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Publication #:
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Pub Dt:
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01/23/2003
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Inventors:
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Masuhiro Natsuhara, Hirohiko Nakata, Akira Kuibira, Kenji Shinma
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Title:
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HEATER MEMBER FOR MOUNTING HEATING OBJECT AND SUBSTRATE PROCESSING APPARATUS USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-33, KITAHAMA 4-CHOME, CHUO-KU, OSAKA-SHI |
| OSAKA, JAPAN |
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| FASSE PATENT ATTORNEYS, P.A. |
| P.O. BOX 726 |
| HAMPDEN, ME 04444-0726 |
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