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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	NONE	Issue Dt:		Application #:	09908999	Filing Dt:	07/18/2001
Publication #:	20030017268	Pub Dt:	01/23/2003
Inventors:	Jianhua Hu, Hanh D. Nguyen, Xiaoxiong Yuan, Anzhong Chang, Hongbee Teoh et al
Title:	.METHOD OF CVD TITANIUM NITRIDE FILM DEPOSITION FOR INCREASED TITANIUM NITRIDE FILM UNIFORMITY

Assignment: 1

Reel/Frame:

Recorded: 07/18/2001

Pages: 15

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

Exec Dt:

07/11/2001

NGUYEN, HANH D.

Exec Dt:

07/02/2001

CHIAO, STEVE H.

Exec Dt:

07/12/2001

YUAN, XIAOXIONG

Exec Dt:

06/28/2001

Exec Dt:

07/09/2001

Exec Dt:

07/10/2001

GELATOS, AVGERINOS

Exec Dt:

07/18/2001

Assignee:

APPLIED MATERIALS, INC.

LEGAL AFFAIRS DEPARTMENT - M/S 2061

P.O. BOX 450A

SANTA CLARA, CALIFORNIA 95052

Correspondent:

APPLIED MATERIALS, INC.

ROBERT W. MULCAHY, PATENT COUNSEL

LEGAL AFFAIRS DEPARTMENT - M/S 2061

P.O. BOX 450A

SANTA CLARA, CALIFORNIA 95052

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