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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6724002
Issue Dt:
04/20/2004
Application #:
10055121
Filing Dt:
01/22/2002
Publication #:
20030042434
Pub Dt:
03/06/2003
Inventors:
Marian Mankos, Steven T. Coyle, Andres Fernandez, Allan L. Sagle, Paul C. Allen et al
Title:
MULTIPLE ELECTRON BEAM LITHOGRAPHY SYSTEM WITH MULTIPLE BEAM MODULATED LASER ILLUMINATION
Assignment: 1
Reel/Frame:
012810/0523Recorded: 06/18/2002Pages: 31
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MANKOS, MARIAN
Exec Dt:
05/16/2002
COYLE, STEVEN T.
Exec Dt:
04/24/2002
FERNANDEZ, ANDRES
Exec Dt:
04/26/2002
SAGLE, ALLAN L.
Exec Dt:
04/25/2002
ALLEN, PAUL C.
Exec Dt:
04/29/2002
CHEN, XIAOLAN
Exec Dt:
04/25/2002
HOLMGREN, DOUGLAS
Exec Dt:
04/23/2002
OWENS, WINDSOR
Exec Dt:
05/01/2002
SULLIVAN, JEFFREY
Exec Dt:
04/23/2002
THOMAS, TIM
Exec Dt:
04/29/2002
GESLEY, MARK A.
Exec Dt:
05/06/2002
Assignee:
APPLIED MATERIALS, INC.
LEGAL AFFAIRS DEPARTMENT - M/S 2061
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
LEGAL AFFAIRS DEPARTMENT - M/S 2061
P.O. BOX 450A
SANTA CLARA, CA 95052

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