Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10239857
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Filing Dt:
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10/02/2002
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Publication #:
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Pub Dt:
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03/13/2003
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Inventor:
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Wayne L. Johnson
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Title:
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Method and apparatus for distributing gas within high density plasma process chamber to ensure uniform plasma
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107 |
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| OBLON, SPIVAK, MCCLELLAND, ET AL. |
| MICHAEL R. CASEY |
| 1755 JEFFERSON DAVIS HIGHWAY |
| 4TH FLOOR |
| ARLINGTON, VA 22202 |
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