Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10230181
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Filing Dt:
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08/29/2002
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Publication #:
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Pub Dt:
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03/20/2003
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Inventors:
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Tatsuhisa Matsunaga, Hiroshi Sekiyama, Kouichi Noto
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Title:
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Substrate processing apparatus and a method for fabricating a semiconductor device by using same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-20, 3-CHOME, HIGASHI-NAKANO |
| NAKANO-KU, TOKYO 164-8511, JAPAN |
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| BACON & THOMAS, PLLC |
| EUGENE MAR |
| 625 SLATERS LANE |
| FOURTH FLOOR |
| ALEXANDRIA, VA 22314 |
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