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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10135452
Filing Dt:
05/01/2002
Publication #:
Pub Dt:
04/03/2003
Inventors:
Hyung-Ho Ko, Kun-Tack Lee, Im-Soo Park, Yong-Pil Han, Song-Rok Ha
Title:
Method of and system for cleaning a semiconductor wafer simultaneously using electrolytically ionized water and diluted hydrofluoric acid
Assignment: 1
Reel/Frame:
012856/0319Recorded: 05/01/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/18/2002
Exec Dt:
04/18/2002
Exec Dt:
04/18/2002
Exec Dt:
04/18/2002
Exec Dt:
04/19/2002
Assignee:
SUWON-CITY
416, MAETAN-DONG, PALDAL-GU
KYUNGKI-DO, KOREA, REPUBLIC OF
Correspondent:
VOLENTINE FRANCOS, PLLC
ADAM C. VOLENTINE
12200 SUNRISE VALLEY DRIVE
SUITE 150
RESTON, VA 20191

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