Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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10254664
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Filing Dt:
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09/26/2002
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Publication #:
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Pub Dt:
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04/17/2003
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Inventor:
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Takahiro Ikeda
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Title:
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Fine Pattern Inspection Apparatus & Method and Managing Apparatus & Method of Critical Dimension Scanning Electron Microscope Device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1 SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| FINNEGAN HENDERSON FARABOW, ET AL. |
| ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, DC 20005-3315 |
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