Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
03/30/2004
|
Application #:
|
09984903
|
Filing Dt:
|
10/31/2001
|
|
Publication #:
|
|
Pub Dt:
|
05/01/2003
| | | | |
|
Inventors:
|
Yu-An Lin, Long-Wen Lin, Wen-Cheng Lai, Chang-Ping Lin
|
|
Title:
|
METHOD AND APPARATUS FOR REGULATING EXHAUST PRESSURE IN EVACUATION SYSTEM OF SEMICONDUCTOR PROCESS CHAMBER
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 16, LI-HSIN ROAD |
| HSIN-CHU CITY, TAIWAN R.O.C |
|
|
|
|
| LOWE HAUPTMAN GILMAN & BERNER |
| BENJAMIN J. HAUPTMAN |
| 1700 DIAGONAL RD. |
| SUITE 310 |
| ALEXANDRIA, VA 22314 |
|
|
Search Results as of:
11/12/2024 01:43 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
