Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10033107
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Filing Dt:
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10/26/2001
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Publication #:
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Pub Dt:
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05/01/2003
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Inventors:
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Joseph Petrucci, John Maltabes, Karl Mautz
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Title:
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Method and system for monitoring a semiconductor wafer plasma etch process
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LAW DEPARTMENT |
| 1303 EAST ALGONQUIN ROAD |
| SCHAUMBURG, ILLINOIS 60196 |
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| MOTOROLA, INC. |
| PATRICIA S. GODDARD |
| 7700 W. PARMER LANE |
| MD: TX32/PL02 |
| AUSTIN, TX 78729 |
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