Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10198370
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Filing Dt:
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07/18/2002
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Publication #:
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Pub Dt:
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06/26/2003
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Inventor:
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Steven R. Walther
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Title:
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Plasma implantation system and method with target movement
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| VARIAN SEMICONDUCTOR EQUIP ASSOC. INC. |
| GARY LOSER |
| 35 DORY ROAD |
| GLOUCESTER, MA |
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