Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10281386
|
Filing Dt:
|
10/25/2002
|
|
Publication #:
|
|
Pub Dt:
|
07/03/2003
| | | | |
|
Inventors:
|
Ling Chen, Hua Chung, Sean M. Seutter, Michael X. Yang, Ming Xi, Vincent Ku, Dien-Yeh Wu et al
|
|
Title:
|
Integration of ALD tantalum nitride and alpha-phase tantalum for copper metallization application
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
|
|
|
|
| APPLIED MATERIALS INC. |
| PATENT COUNSEL |
| PETER J. SGARBOSSA |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
|
|
Search Results as of:
05/22/2024 05:52 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
