Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10076721
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Filing Dt:
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02/13/2002
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Publication #:
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Pub Dt:
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08/14/2003
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Inventors:
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Elisabeth Weikmann, Aduato Diaz JR., Sharma V. Pamarthy, Ajay Kumar et al
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Title:
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Method and apparatus for providing modulated bias power to a plasma etch reactor
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450A |
| PATENT COUNSEL |
| SANTA CLARA, C 95052 |
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