Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10263063
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Filing Dt:
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10/01/2002
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Publication #:
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Pub Dt:
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08/28/2003
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Inventor:
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Rajiv K. Singh
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Title:
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Method, composition and apparatus for tunable selectivity during chemical mechanical polishing of metallic structures
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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223 GRINTER HALL |
GAINESVILLE, FLORIDA 32611 |
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AKERMAN SENTERFITT |
GREGORY A. NELSON |
222 LAKEVIEW AVENUE, SUITE 400 |
WEST PALM BEACH, FL 33401 |
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