Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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10092479
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Filing Dt:
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03/07/2002
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Publication #:
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Pub Dt:
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09/11/2003
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Inventors:
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Milind S. Bhagavat, Yun-Biao Xin, Gary L. Anderson, Brent F. Teasley
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Title:
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METHOD OF ESTIMATING POST-POLISHING WAVINESS CHARACTERISTICS OF A SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 8 |
501 PEARL DRIVE |
ST. PETERS, MISSOURI 63376 |
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SENNIGER, POWERS, LEAVIT, ET AL. |
DERICK E. ALLEN |
ONE METROPOLITAN SQUARE |
16TH FLOOR |
ST. LOUIS, MO 63102 |
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