Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10094288
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Filing Dt:
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03/08/2002
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Publication #:
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Pub Dt:
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09/11/2003
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Inventors:
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Chen-Kuei Chung, Hui-Chuan Lu
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Title:
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METHOD FOR REDUCING REACTIVE ION ETCHING (RIE) LAG IN SEMICONDUCTOR FABRICATION PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 195 SECTION 4, CHUNG HSING ROAD |
| ROOM 51-103 TTSC/B100 |
| CHUTUNG, HSINCHU 310, TAIWAN R.O.C |
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| TUNG & ASSOCIATES |
| RANDY W. TUNG |
| 838 W. LONG LAKE ROAD |
| SUITE 120 |
| BLOOMFIELD HILLS, MI 48302 |
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