Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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10093050
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Filing Dt:
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03/06/2002
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Publication #:
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Pub Dt:
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09/18/2003
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Inventors:
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Anisul Khan, Ajay Kumar, Padmapani Nallan
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Title:
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TECHNIQUES FOR PLASMA ETCHING SILICON-GERMANIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT-M/S 2061 |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| LEGAL AFFAIRS DEPARTMENT PATENT COUNSEL |
| P.O. BOX 450A M/S 2061 |
| SANTA CLARA, CA 95052 |
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