Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/12/2004
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Application #:
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10103618
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Filing Dt:
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03/21/2002
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Publication #:
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Pub Dt:
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09/25/2003
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Inventors:
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Yi-Lung Cheng, Hui-Chi Lin, Szu-An Wu, Ying-Lang Wang
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Title:
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SEMICONDUCTOR CHAMBER PROCESS APPARATUS AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 121 PARK AVE. 3 SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C |
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| RANDY W. TUNG |
| TUNG & ASSOCIATES |
| 838 W. LONG LAKE ROAD |
| SUITE 120 |
| BLOOMFIELD HILLS, MICHIGAN 48302 |
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