Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/15/2006
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Application #:
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10383607
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Filing Dt:
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03/10/2003
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Publication #:
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Pub Dt:
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10/16/2003
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Inventors:
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In-Jun Yeo, Byoung-Moon Yoon, Kyung-Hyun Kim, Sang-Rok Hah, Jeong-Lim Nam, Hyun-Ho Jo
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Title:
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APPARATUS AND METHOD FOR CLEANING A SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416, MAETAN-DONG, PALDAL-GU, SUWON-CITY |
| KYUNGKI-DO,, KOREA, REPUBLIC OF |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 8910 |
| RESTON, VA 20195 |
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