Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10127487
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Filing Dt:
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04/23/2002
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Publication #:
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Pub Dt:
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10/23/2003
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Inventors:
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Ching-Ping Wu, H. W. Lee, Szu-Cheng Huang, Hsin-Cheng Liu, Nan-Tzu Lian
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Title:
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Eliminating residual polymer in the cleaning process of post pad etching
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SCIENCE-BASED INDUSTRIAL PARK |
NO. 16, LI HSIN ROAD |
HSINCHU, TAIWAN R.O.C |
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POWELL, GOLDSTEIN, FRAZER & MURPHY LLP |
THOMAS T. MOGA |
P.O. BOX 97223 |
WASHINGTON, DC 20090-7223 |
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