Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10141994
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Filing Dt:
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05/08/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Inventors:
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Hsuan-Sheng Tung, Hsin-Ta Chien, Jui-Ping Li
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Title:
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Method for decreasing wafer scrap rate for a chemical treatment apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 16, CREATION RD. 1 |
| HSINCHU, TAIAN, TAIWAN R.O.C |
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| BAKER BOTTS L.L.P. |
| JAMES J. MAUNE |
| 30 ROCKEFELLER PLAZA-44 FL. |
| NEW YORK, NY 10112 |
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