Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10141515
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Filing Dt:
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05/07/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Inventors:
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Young Jai Lee, Ronald L. Wang, Steven Ly, Daniel J. Devine
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Title:
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Process and system for heating semiconductor substrates in a processing chamber containing a susceptor
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2800 BAYVIEW DRIVE |
| FREMONT, CALIFORNIA 94538 |
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| DORITY & MANNING, PA |
| TIMOTHY A. CASSIDY, ESQ. |
| P O BOX 1449 |
| GREENVILLE, SC 29602 |
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