Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10394047
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Filing Dt:
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03/24/2003
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Publication #:
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Pub Dt:
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11/20/2003
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Inventors:
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Masafumi Asano, Nobuhiro Komine, Soichi Inoue
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Title:
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MONITORING METHOD, EXPOSURE METHOD, A MANUFACTURING METHOD FOR A SEMICONDUCTOR DEVICE, INCLUDING AN ETCHING METHOD AND EXPOSURE PROCESSING UNIT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1 SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| FINNEGAN HENDERSON FARABOW ET.AL. |
| ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005-3315 |
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