Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/23/2005
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Application #:
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10447844
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Filing Dt:
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05/29/2003
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Publication #:
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Pub Dt:
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12/04/2003
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Inventors:
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Michael Fritze, Brian Tyrrell
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Title:
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METHOD FOR PHOTOLITHOGRAPHY USING MULTIPLE ILLUMINATIONS AND A SINGLE FINE FEATURE MASK
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Assignment:
1
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 40 WRIGHT STREET, BLDG 1120 |
| ESC/JAZ |
| HANSCOM AFB, MASSACHUSETTS 01731-2903 |
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| CATHERINE A. SCHULZ |
| ESC/JAX |
| 40 WRIGHT STREET |
| BLDG 1120 |
| HANSCOM AFB, MA 01731-2903 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 77 MASSACHUSETTS AVENUE |
| CAMBRIDGE, MASSACHUSETTS 02139 |
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| SAMUELS, GAUTHIER, STEVENS, LLP |
| MATTHEW E. CONNORS |
| 225 FRANKLIN ST. |
| BOSTON, MA 02110 |
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