Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10159183
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Filing Dt:
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05/31/2002
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Publication #:
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Pub Dt:
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12/04/2003
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Inventors:
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Wei-Yung Hsu, Yutao Ma, Sen-Hou Ko, Daniel A. Carl
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Title:
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Web pad design for chemical mechanical polishing
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT DEPARTMENT |
| P.O. BOX 450A - M/S #2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| PETER J. SGARBOSSA |
| PATENT COUNSEL, PATENT DEPT. |
| P.O. BOX 450A - M/S 2061 |
| SANTA CLARA, CA 95052 |
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