Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/10/2004
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Application #:
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10064369
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Filing Dt:
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07/08/2002
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Publication #:
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Pub Dt:
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01/08/2004
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Inventors:
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Szu-Tsun Ma, Kent Kuohua Chang
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Title:
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METHOD OF BOOSTING WAFER CLEANING EFFICIENCY AND INCREASING PROCESS YIELD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 16, LI-HSIN RD., SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN |
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| JIANQ CHYUN INTELLECTUAL PROPERTY OFFICE |
| 7 FLOOR-1, NO. 100 |
| ROOSEVELT ROAD, SECTION 2 |
| TAIPEI, TAIWAN 100 |
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