Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10321033
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Filing Dt:
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12/16/2002
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Publication #:
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Pub Dt:
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01/22/2004
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Inventors:
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Hua Chung, Hongbin Fang, Ken K. Lai, Jeong Soo Byun, Alfred W. Mak, Michael X. Yang et al
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Title:
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Formation of titanium nitride films using a cyclical deposition process
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVE |
M/S 2061 |
SANTA CLARA, CALIFORNIA 95054 |
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APPLIED MATERIALS, INC. |
ROBERT W. MULCAHY |
PO BOX 450-A |
PATENT COUNSEL, M/S 2061 |
SANTA CLARA, CA 95052 |
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