Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10205961
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Filing Dt:
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07/26/2002
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Publication #:
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Pub Dt:
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01/29/2004
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Inventors:
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Steven R. Walther, Ziwei Fang, Bon-Woong Koo, Susan B. Felch
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Title:
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Methods and apparatus for monitoring plasma parameters in plasma doping systems
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 10930 |
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| VARIAN SEMICONDUCTOR EQUIP. ASSOC., INC. |
| MARK A. SUPERKO, ESQ. |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930-2297 |
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