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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10065145
Filing Dt:
09/20/2002
Publication #:
Pub Dt:
02/05/2004
Inventors:
Chin-Lung Lin, Chuen-Huei Yang, Wen-Tien Hung
Title:
Photolithography process with hybrid chromeless phase shift mask
Assignment: 1
Reel/Frame:
013106/0185Recorded: 09/20/2002Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/23/2002
Exec Dt:
08/23/2002
Exec Dt:
08/23/2002
Assignee:
HSINCHU, TAIWAN
Correspondent:
J C PATENTS, INC.
4 VENTURE, SUITE 250
IRVINE, CA 92618

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