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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/06/2006
Application #:
10399203
Filing Dt:
04/14/2003
Publication #:
Pub Dt:
02/05/2004
Inventor:
Haruo Kokubo
Title:
METHODS OF MANUFACTURING PHASE SHIFT MASKS HAVING ETCHED SUBSTRAT SHIFTERS WITH SIDEWALLS ROUNDED AT TOP AND BOTTOM CORNERS
Assignment: 1
Reel/Frame:
014233/0095Recorded: 04/14/2003Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
03/27/2003
Assignee:
1-1, ICHIGAYA-KAGACHO 1-CHOME, SHINJUKI-KU
TOKYO-TO, JAPAN 162-8001
Correspondent:
C/O LADAS & PARRY
RICHARD J. STREIT
224 SOUTH MICHIGAN AVENUE
CHICAGO, IL 60604

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