Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10342575
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Filing Dt:
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01/14/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Inventors:
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Jin-Yuan Chen, Frank F. Hooshdaran, Dragan V. Podlesnik
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Title:
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Etch chamber with dual frequency biasing sources and a single frequency plasma generating source
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| POST OFFICE BOX 450A |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS INC. |
| PATENT COUNSEL |
| POST OFFICE BOX 450A |
| SANTA CLARA, CA 95052 |
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