Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/19/2006
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Application #:
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10381945
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Filing Dt:
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08/07/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Inventors:
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Martin Antoni, Wolfgang Singer, Johannes Wangler
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Title:
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ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| 73447 OBERKOCHEN, GERMANY |
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| OHLANDT, GREELEY, RUGGIERO ET AL. |
| CHARLES N.J. RUGGIERO, ESQ. |
| ONE LANDMARK SQUARE, 10TH FLOOR |
| STAMFORD, CT 06901-2682 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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