Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10416568
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Filing Dt:
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09/09/2003
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Publication #:
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Pub Dt:
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02/26/2004
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Inventors:
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Riki Tomoyoshi, Katsuyuki Koizumi
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Title:
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Plasma processing apparatus and method for asssembling the plasma processing apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| SMITH, GAMBRELL & RUSSELL |
| MICHAEL A. MAKUCH |
| 1850 M STREET, N.W. |
| STE. 800 |
| WASHINGTON, DC 20036 |
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