Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/19/2006
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Application #:
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10438963
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Filing Dt:
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05/14/2003
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Publication #:
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Pub Dt:
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02/26/2004
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Inventors:
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Joel L. Seligson, Mark Ghinovker, John Robinson, Pavel Izikson, Michael E. Adel et al
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Title:
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USE OF OVERLAY DIAGNOSTICS FOR ENHANCED AUTOMATIC PROCESS CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| BEYER WEAVER & THOMAS LLP |
| P.O. BOX 778 |
| BERKELEY, CA 94704-0778 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| BEYER WEAVER & THOMAS, LLP |
| MARY R. OLYNICK |
| P.O. BOX 778 |
| BERKELEY, CA 94704-0778 |
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