Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10648426
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Filing Dt:
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08/27/2003
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Publication #:
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Pub Dt:
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03/04/2004
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Inventors:
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Tadahiro Ishizaka, Yasuhiko Kojima, Yasuhiro Oshima, Takashi Shigeoka
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Title:
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Processing apparatus having a support member made of metal matrix composite between a process chamber and a title placement stage
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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| CROWELL & MORING, L.L.P. |
| HERBERT I. CANTOR |
| PO BOX 14300 |
| IP GROUP |
| WASHINGTON, DC 20044-4300 |
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