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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6875705
Issue Dt:
04/05/2005
Application #:
10235193
Filing Dt:
09/04/2002
Publication #:
20040043624
Pub Dt:
03/04/2004
Inventors:
Chao-Jie Tsai, Jeng Yang Pan, Chin-Nan Wu, Su-Yu Yeh, Meng-Chang Liu
Title:
METHOD OF HIGH SELECTIVITY WET ETCHING OF SALICIDES
Assignment: 1
Reel/Frame:
013266/0887Recorded: 09/04/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TSAI, CHAO-JIE
Exec Dt:
05/31/2002
PAN, JENG-YANG
Exec Dt:
05/31/2002
WU, CHIN-NAN
Exec Dt:
05/31/2002
LIU, MENG-CHANG
Exec Dt:
05/31/2002
YEH, SU-YU
Exec Dt:
05/31/2002
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 121 PARK AVENUE 3
SCIENCE-BASED INDUSTRIAL PARK
HSIN-CHU, TAIWAN R.O.C.
Correspondent:
TUNG & ASSOCIATES
RANDY W. TUNG
838 W. LONG LAKE ROAD
SUITE 120
BLOOMFIELD HILLS, MI 48302

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