Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10621464
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Filing Dt:
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07/18/2003
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Publication #:
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Pub Dt:
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03/18/2004
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Inventors:
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Wayne L. Johnson, Steven T. Fink, Jeff Browning, Jovan Jevtic
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Title:
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Vertically translatable chuck assembly and method for a plasma reactor system
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-6, AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107, JAPAN |
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PILLSBURY WINTHROP LLP |
DALE S. LAZAR |
INTELLECTUAL PROPERTY GROUP |
P.O. BOX 10500 |
MCLEAN, VA 22102 |
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