Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/07/2005
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Application #:
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10244362
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Filing Dt:
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09/16/2002
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Publication #:
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Pub Dt:
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03/18/2004
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Inventors:
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Richard S. Wise, Sadanand V. Deshpande, Wendy Yan, Arpan P. Mahorowala, Scott D. Allen
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Title:
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IN-SITU PLASMA ETCH FOR TERA HARD MASK MATERIALS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NEW ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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WHITHAM, CURTIS & CHRISTOFFERSON, P.C. |
MICHAEL E. WHITHAM, ESQ. |
11491 SUNSET HILLS ROAD SUITE 340 |
RESTON, VA 20190 |
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